In this study we investigate the influence of the operation method in Kelvin probe force microscopy (KPFM) on the measured potential distribution. KPFM is widely used to map the nanoscale potential distribution in operating devices. e. g. https://www.ceomelinh.com/product-category/north-carolina/
Know your full potential: Quantitative Kelvin probe force microscopy on nanoscale electrical devices
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